Description:   The furnace stacks were completely refurbished in 1998.  The 8 tubes include: dry-ox, wet-ox, poly-Si, nitride, B-doping, P-doping, anneal and LTO.  The furnaces are 'state-of-the-art with the recent upgrade of controllers with SEMY Mypro II DDC Microprocessor Units. 

Specification: 4-inch silicon wafers; optimal temperatures: dry-ox (1000 ^oC); wet-ox (1050 ^oC); poly-Si (650 ^oC); nitride (800 ^oC); B-doping (700 ^oC); P-doping (900 ^oC); anneal (400 - 900 ^oC); LTO (undergoing installation).