Description:  The Surfscan is used to determine particle contamination.  The instrument can measure 2, 3, 4, 5 and 6-inch wafers.   

Specification: The instrument has a 90% detection probability of 0.22 mm diameter latex spheres on bare silicon substrates.  It uses a 2 mW He:Ne laser.  The haze sensitivity is 0.4 ppm.  The Surfscan has a cycle of 400 laser scans per second with a forward motion of 10 mm/second.  A typical 100 mm wafer load, measure, unload cycle is 36 seconds.