| Rudolph AutoEL II Ellipsometer Description: The Rudolph is a single wavelength ellipsometer using the 632.8 nm line of a He:Ne laser for measuring film thickness and refractive index. Specifications: The typical angle of incidence is 75o. Measurement resolution of 3 -10 Angstroms on thickness and 0.01 refractive index units are typical. |
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Page Updated On: 06/22/01