Description: The Karl Suss is a highly versatile tool which can handle 1mm pieces up to 4-inch wafers. 

Specification: Mask size up to 4-inches square; Wafer size is up to 3-inches; Light source 350 Watt Hg-arc lamp with useable wavelengths that include G-line (436 nm), H-line (405 nm) and I-line (365 nm); Exposure reliability +/- 3%.