Description: This production tool is dedicated to Al deposition on 4-inch wafers.  The carousel rotates during deposition and holds 18 wafers.

Specifications: 10 keV power supply; diffusion pump with cold trap; base pressure 2 x 10^-6 Torr; Inficon film thickness monitor

CHA 1000-SE E-beam Evaporator

Description: This production tool is used for refractory metal deposition, though is also used for Al.  At present, the evaporator handles one 4-inch wafer at a time.

Specifications: 10 keV power supply; CTI 10-inch cryo-pump; base pressure 1 x10^-6 Torr.

CHA 600-SE 

CHA 1000-SE