Description: The Canon aligner has a through put of 45 wafers per hour, cassette to cassette.  Proximity, soft and hard contact print methods are available on this tool.  

Specification: Mask size 5-inches square; Wafer size is 4-inches; Light source 250 Watt Hg-arc lamp with useable wavelengths that include G-line (436 nm), H-line (405 nm) and I-line (365 nm); Exposure reliability +/- 3%.